CHEMICAL-MECHANICAL POLISHING - FUNDAMENTALS AND CHALLENGES by Suryadevara V. Babu (Editor), S. Danyluk (Editor), M. Krishnan (Editor) ( 9781558994737 )

Item Details

Title:

CHEMICAL-MECHANICAL POLISHING - FUNDAMENTALS AND CHALLENGES

By:

Suryadevara V. Babu (Editor), S. Danyluk (Editor), M. Krishnan (Editor)

Format:

Hardback

List price:

£32.00

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£28.80

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£3.20

ISBN 10:

1558994734

ISBN 13:

9781558994737

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Publisher:

MATERIALS RESEARCH SOCIETY

Pub. date:

10 February, 2000

Series:

MRS Proceedings Volume 566

Pages:

281

Description:

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Synopsis:

Chemical-mechanical planarization (CMP) has emerged over the past few years as a key enabling technology in the relentless drive of the semiconductor industry towards smaller, faster and less expensive interconnects. However, there are still many gaps in the fundamental understanding of the overall CMP process and the associated defect and contamination issues. This book brings together many of the active players in the field to focus on the interdisciplinary nature of these challenges. It reflects, to some extent, the role played by both academic institutions and multinational corporations in opening up the frontiers in the field of CMP for wider dissemination. Both experimental and theoretical contributions are included. Topics include: overview and oxide polishing; pads and related issues; metal polishing - W and Al; copper polishing and related issues; CMP modeling and fluid flow; and particle adhesion and post-polish cleaning.

Publication:

Imprint:

Materials Research Society

Returns:

Returnable

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