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Item Details
| Title:
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NANOFABRICATION
TECHNIQUES AND PRINCIPLES |
| By: |
Maria Stepanova (Editor), Steven Dew (Editor) |
| Format: |
Paperback |
| List price:
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£109.99 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
370911666X |
| ISBN 13: |
9783709116661 |
| Publisher: |
SPRINGER VERLAG GMBH |
| Pub. date: |
27 January, 2014 |
| Edition: |
2012 ed. |
| Pages: |
344 |
| Description: |
This volume updates scientists and engineers on the state of the art in various key techniques used to fabricate nanoscale structures. As well as covering lithographic creation of nano features, it focuses on new and revolutionary devices such as biosensors. |
| Synopsis: |
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years. |
| Illustrations: |
VIII, 344 p. |
| Publication: |
Austria |
| Imprint: |
Springer Verlag GmbH |
| Returns: |
Returnable |
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