SILICON MICROMACHINING by M. Elwenspoek ( 9780521590549 ) - Books & Audio Books at Pickabook.co.uk

Item Details

Title:

SILICON MICROMACHINING

By:

Format:

Hardback

List price:	£90.00
We currently do not stock this item, please contact the publisher directly for further information.

ISBN 10:

052159054X

ISBN 13:

9780521590549

Publisher:

CAMBRIDGE UNIVERSITY PRESS

Pub. date:

13 May, 1999

Series:

Cambridge Studies in Semiconductor Physics and Microelectronic Engineering

Pages:

420

Description:

A comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.

Returns:

Returnable

Some other items by this author:

MECHANICAL MICROSENSORS (HB)

MECHANICAL MICROSENSORS (PB)

SENSOR TECHNOLOGY (HB)

SILICON MICROMACHINING (PB)

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