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Item Details
| Title:
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ADVANCED METALLIZATION CONFERENCE 2000 (AMC 2000)
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| Volume: |
Volume 16 |
| By: |
Dan Edelstein (Editor), Girish Dixit (Editor), Yukio Yasuda (Editor) |
| Format: |
Hardback |
| List price:
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£22.99 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
1558995749 |
| ISBN 13: |
9781558995741 |
| Publisher: |
MATERIALS RESEARCH SOCIETY |
| Pub. date: |
1 March, 2002 |
| Series: |
MRS Conference Proceedings |
| Pages: |
706 |
| Description: |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. |
| Synopsis: |
This book focuses on recent work in on-chip interconnects and other aspects of advanced metallization. In particular, the concentration for this year's volume is on the rapid advances in copper and low-K. The volume is divided into nine parts: Part I contains an invited perspective on the state of semiconductor research and development in Japan; Part II focuses on performance aspects of interconnect architectures; Part III includes some of the most significant recent advances in copper/low-K integration; Part IV is an in-depth collection of electrochemical and chemical processes, mainly pertaining to copper; Part V contains state-of-the-art papers on thin-film diffusion barriers, again mainly for copper wiring; Part VI covers reliability engineering and results; Part VII is a collection of alternative and novel processes and systems related to circuit interconnection; Part VIII contains papers on specific low-K dielectrics and their properties, and new methods for their characterization; and Part IX covers continuing advances in the Al(Cu)/W metallization system. |
| Publication: |
US |
| Imprint: |
Materials Research Society |
| Returns: |
Returnable |
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